Equivalence and Accuracy of MOSFET Channel Length...

Japanese Journal of Applied Physics 1989 / 2 Vol. 28; Iss. Part 1, No

Equivalence and Accuracy of MOSFET Channel Length Measurement Techniques

Jain, Sanjay
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Volume:
28
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.160
Date:
February, 1989
File:
PDF, 927 KB
1989
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