Chemical Kinetic Analysis on the Growth Mechanism of Diamondlike Films from a CH 3 OH–H 2 Mixture
Matsui, Yasuji, Sahara, MiekoVolume:
28
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.1023
Date:
June, 1989
File:
PDF, 1.16 MB
1989