CF[sub 4]-Plasma-Induced Fluorine Passivation Effects on...

Journal of The Electrochemical Society 2008 Vol. 155; Iss. 2

CF[sub 4]-Plasma-Induced Fluorine Passivation Effects on Poly-Si TFTs with High-κ Pr[sub 2]O[sub 3] Gate Dielectric

Chang, Chia-Wen, Huang, Po-Wei, Deng, Chih-Kang, Huang, Jiun-Jia, Chang, Hong-Ren, Lei, Tan-Fu
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Volume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2816281
File:
PDF, 839 KB
english, 2008
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