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[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Probing Point Defects in Stacks of Ultrathin High-k Metal Oxides on Semiconductors by Electron Spin Resonance: The Si/HfO2 vs the Ge/HfO2 System
Stesmans, Andre, Afanas'ev, Valery, Clemer, K.Volume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2209284
File:
PDF, 351 KB
english, 2006