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Crystallographic properties of grain size-controlled polycrystalline silicon thin films deposited on alumina substrate
Akiyoshi Ogane, Shinya Honda, Yukiharu Uraoka, Takashi Fuyuki, Antonín Fejfar, Jan KočkaVolume:
311
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2008.09.098
File:
PDF, 827 KB
english, 2009