MOVPE Growth of AlGaAs/GaAs Heterostructures for HEMT LSI

Japanese Journal of Applied Physics 1989 / 10 Vol. 28; Iss. Part 2, No

MOVPE Growth of AlGaAs/GaAs Heterostructures for HEMT LSI

Itoh, Hiromi, Tanaka, Hitoshi, Ohori, Tatsuya, Kasai, Kazumi, Mitani, Eizo, Suzuki, Masahisa, Komeno, Junji
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Volume:
28
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.L1693
Date:
October, 1989
File:
PDF, 380 KB
1989
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