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Process design of the pulse injection method for low-temperature metal organic vapor phase epitaxial growth of AlN at 800 °C
Jung-Seung Yang, Hassanet Sodabanlu, Ichitaro Waki, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro ShimogakiVolume:
311
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2008.10.086
File:
PDF, 687 KB
english, 2009