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VERTICAL SILICON NANOWIRES WITH ATOMIC LAYER DEPOSITION WITH HfO 2 MEMBRANE FOR pH SENSING APPLICATION
LIN, YI-TING, YU, YU-HONG, CHEN, YU, ZHANG, GUO-JUN, ZHU, SHI-YANG, YANG, CHIA-MING, LU, KUA-YI, LAI, CHAO-SUNGVolume:
11
Language:
english
Journal:
Journal of Mechanics in Medicine and Biology
DOI:
10.1142/s0219519411004897
Date:
December, 2011
File:
PDF, 370 KB
english, 2011