Residual damage in B + and...

Canadian Journal of Physics 1985 / 06 Vol. 63; Iss. 6

Residual damage in B + and –implanted Si

Vandervorst, W., Houghton, D. C., Shepherd, F. R., Swanson, M. L., Plattner, H. H., Carpenter, G. J. C.
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Volume:
63
Language:
english
Journal:
Canadian Journal of Physics
DOI:
10.1139/p85-140
Date:
June, 1985
File:
PDF, 872 KB
english, 1985
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