Dependence of RF power on the phase transformation for boron nitride films deposited on graphite at room temperature
Xuxin Yang, Hongdong Li, Yingai Li, Xianyi Lü, Shiyong Gao, Pinwen Zhu, Qing Zhang, Tiechen Zhang, Guangtian ZouVolume:
311
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2009.04.041
File:
PDF, 372 KB
english, 2009