Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1985 Vol. 3; Iss. 4
The influence of oxidation and annealing on InP native chemical oxides
G. S. KorotchenkovVolume:
3
Year:
1985
Language:
english
DOI:
10.1116/1.583026
File:
PDF, 564 KB
english, 1985