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Optimizing the growth of CoSi2 film with oxide-mediated CoSi2 template by silicon cap layer
M. Xu, A. Vantomme, D. Smeets, K. Vanormelingen, S.D. YaoVolume:
311
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.jcrysgro.2009.06.049
File:
PDF, 369 KB
english, 2009