A Modified Method to Model the Effect of Residual Stress on Touch-point Pressure and Pull-in Voltage for MEMS Capacitive Transducers using Square Diaphragm
Sharma, AnurekhaVolume:
57
Year:
2011
Language:
english
Journal:
IETE Journal of Research
DOI:
10.4103/0377-2063.81739
File:
PDF, 1.12 MB
english, 2011