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Investigation of void formation beneath thin AlN layers by decomposition of sapphire substrates for self-separation of thick AlN layers grown by HVPE
Yoshinao Kumagai, Yuuki Enatsu, Masanari Ishizuki, Yuki Kubota, Jumpei Tajima, Toru Nagashima, Hisashi Murakami, Kazuya Takada, Akinori KoukituVolume:
312
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.jcrysgro.2010.04.008
File:
PDF, 1.21 MB
english, 2010