Large-Area MOVPE Growth of AlGaAs/GaAs Heterostructures for...

Japanese Journal of Applied Physics 1990 / 1 Vol. 29; Iss. Part 2, No

Large-Area MOVPE Growth of AlGaAs/GaAs Heterostructures for HEMT LSIs

Tanaka, Hitoshi, Tomesakai, Nobuaki, Itoh, Hiromi, Ohori, Tatsuya, Makiyama, Kozo, Okabe, Tadao, Takikawa, Masahiko, Kasai, Kazumi, Komeno, Junji
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L10
Date:
January, 1990
File:
PDF, 421 KB
1990
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