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Study of Tin Diffusion into Silicon by Backscattering Analysis
Akasaka, Youichi, Horie, Kazuo, Nakamura, Genshiro, Tsukamoto, Katsuhiro, Yukimoto, YoshinoriVolume:
13
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.13.1533
Date:
October, 1974
File:
PDF, 795 KB
1974