Microfabrication technologies for a coupled...

Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array

Rajaraman, Swaminathan, Choi, Seong-O, Shafer, Richard H, Ross, James D, Vukasinovic, Jelena, Choi, Yoonsu, DeWeerth, Stephen P, Glezer, Ari, Allen, Mark G
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/1/021
Date:
January, 2007
File:
PDF, 1.61 MB
english, 2007
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