Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1998 Vol. 16; Iss. 5
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Directional and ionized physical vapor deposition for microelectronics applications
S. M. RossnagelVolume:
16
Year:
1998
Language:
english
DOI:
10.1116/1.590242
File:
PDF, 7.82 MB
english, 1998