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In Situ Optical Monitoring of the GaAs Growth Process in MOCVD
Makimoto, Toshiki, Yamauchi, Yoshiharu, Kobayashi, Naoki, Horikoshi, YoshijiVolume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L207
Date:
February, 1990
File:
PDF, 539 KB
1990