In Situ Optical Monitoring of the GaAs Growth...

In Situ Optical Monitoring of the GaAs Growth Process in MOCVD

Makimoto, Toshiki, Yamauchi, Yoshiharu, Kobayashi, Naoki, Horikoshi, Yoshiji
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L207
Date:
February, 1990
File:
PDF, 539 KB
1990
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