Stress Distribution Analysis in Structured GaAs Layers...

Japanese Journal of Applied Physics 1990 / 6 Vol. 29; Iss. Part 2, No

Stress Distribution Analysis in Structured GaAs Layers Fabricated on Si Substrates

Sakai, Shiro, Kawasaki, Koji, Wada, Naoki
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L853
Date:
June, 1990
File:
PDF, 428 KB
1990
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