Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2009 Vol. 27; Iss. 6
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Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition
Ebm, Christoph, Platzgummer, Elmar, Loeschner, Hans, Eder-Kapl, Stefan, Joechl, Peter, Kuemmel, Marco, Reitinger, Ruediger, Hobler, Gerhard, Koeck, Anton, Hainberger, Rainer, Wellenzohn, Markus, LetzkVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3242693
File:
PDF, 1.27 MB
english, 2009