Selective Epitaxial Growth of AlGaAs by Atmospheric Pressure –MOCVD Using Diethylgalliumchloride and Diethylaluminiumchloride
Yamaguchi, Ko-ichi, Okamoto, KotaroVolume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.1408
Date:
August, 1990
File:
PDF, 3.32 MB
1990