Effect of Si additions on thermal stability and the phase...

Journal of Applied Physics 2015 / 01 Vol. 117; Iss. 2

Effect of Si additions on thermal stability and the phase transition sequence of sputtered amorphous alumina thin films

Bolvardi, H., to Baben, M., Nahif, F., Music, D., Schnabel, V., Shaha, K. P., Mráz, S., Bednarcik, J., Michalikova, J., Schneider, J. M.
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Volume:
117
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4905296
Date:
January, 2015
File:
PDF, 1.88 MB
english, 2015
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