Pyrolysis of Trimethylgallium on GaAs Surfaces Observed by...

Japanese Journal of Applied Physics 1990 / 10 Vol. 29; Iss. Part 2, No

Pyrolysis of Trimethylgallium on GaAs Surfaces Observed by Pulse Surface Reaction Rate Analysis

Hoshino, Masataka
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1741
Date:
October, 1990
File:
PDF, 492 KB
1990
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