In Situ Analysis of Gallium Arsenide Surfaces...

Japanese Journal of Applied Physics 1990 / 10 Vol. 29; Iss. Part 2, No

In Situ Analysis of Gallium Arsenide Surfaces by Coaxial Impact Collision Ion-Scattering Spectroscopy with an Off-Axis Ion Source

Sugiyama, Naoharu, Hashimoto, Akihiro, Tamura, Masao
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1922
Date:
October, 1990
File:
PDF, 444 KB
1990
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