AsH 3 Cracking Characteristics...

Japanese Journal of Applied Physics 1990 / 12 Vol. 29; Iss. Part 1, No

AsH 3 Cracking Characteristics in Gas Source Molecular Beam Epitaxy

Ohbu, Isao, Tezen, Yuta, Ataka, Saburo, Mozume, Teruo
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.29.2768
Date:
December, 1990
File:
PDF, 1.07 MB
1990
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