Growth of GaAs by Cold-Wall Metalorganic-Chloride Vapor...

Japanese Journal of Applied Physics 1990 / 12 Vol. 29; Iss. Part 2, No

Growth of GaAs by Cold-Wall Metalorganic-Chloride Vapor Phase Epitaxy

Ikeda, Hitoshi, Kamisawa, Masaru, Koukitu, Akinori, Seki, Hisashi
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.29.l2149
Date:
December, 1990
File:
PDF, 343 KB
1990
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