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Low Threading Dislocation Density GaAs on Si(100) with InGaAs/GaAs Strained-Layer Superlattice Grown by Migration-Enhanced Epitaxy
Nozawa, Kazuhiko, Horikoshi, YoshijiVolume:
30
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.L668
Date:
April, 1991
File:
PDF, 1.62 MB
1991