Growth kinetics and microstructure of MOCVD iridium coating...

Applied Surface Science 2015 / 02 Vol. 329

Growth kinetics and microstructure of MOCVD iridium coating from iridium(III) acetylacetonate with hydrogen

Yang, Shirui, Yu, Xiaodong, Tan, Chengwen, Wang, Yandong, Ma, Honglei, Liu, Kexue, Cai, Hongnian
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Volume:
329
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.12.146
Date:
February, 2015
File:
PDF, 3.24 MB
english, 2015
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