Acid-Based Etching of Silicon Wafers: Mass-Transfer and Kinetic Effects
Kulkarni, Milind S., Erk, Henry F.Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393172
File:
PDF, 1.21 MB
english, 2000