Electroless Deposition of Ru Films Via an...

Electroless Deposition of Ru Films Via an Oxidative-Reductive Mechanism

Chen, Jing-Yu, Hsieh, Yu-Chi, Wang, Li-Yeh, Wu, Pu-Wei
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Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3592996
File:
PDF, 1.87 MB
english, 2011
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