Synthesis of polymers with a norbornane backbone by radical copolymerization of alkyl 2-norbornene-2-carboxylates for photoresist applications
Ihara, Eiji, Ishii, Satoru, Yokoyama, Kotaro, Fujiwara, Yuka, Ueda, Takafumi, Inoue, Kenzo, Itoh, Tomomichi, Momose, Hikaru, Nodono, MitsufumiVolume:
45
Language:
english
Journal:
Polymer Journal
DOI:
10.1038/pj.2012.180
Date:
June, 2013
File:
PDF, 1.07 MB
english, 2013