Anisotropy in the anodic dissolution of silicon elucidated by in situ infrared spectroscopy
R. Outemzabet, M. Cherkaoui, F. Ozanam, N. Gabouze, N. Kesri, J.-N. ChazalvielVolume:
563
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.jelechem.2003.07.036
File:
PDF, 297 KB
english, 2004