Non uniformities of silicon oxide films grown in peroxide...

Journal of Electroanalytical Chemistry 2005 Vol. 584; Iss. 1

Non uniformities of silicon oxide films grown in peroxide mixtures

V. Bertagna, S. Petitdidier, N. Rochat, D. Rouchon, P. Besson, R. Erre, M. Chemla
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Volume:
584
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.jelechem.2004.10.028
File:
PDF, 437 KB
english, 2005
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