Novel Chemical Analysis for Thin Films: Scanning Electron...

Japanese Journal of Applied Physics 1991 / 9 Vol. 30; Iss. Part 2, No

Novel Chemical Analysis for Thin Films: Scanning Electron Microscopy & Total-Reflection-Angle X-Ray Spectroscopy (SEM-TRAXS)-X-Ray Take-Off Angle Effect

Usui, Toshio, Kamei, Masayuki, Aoki, Yuji, Morishita, Tadataka, Tanaka, Shoji
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Volume:
30
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.L1689
Date:
September, 1991
File:
PDF, 646 KB
1991
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