Nucleation of damage centres during ion implantation of...

Radiation Effects 1971 / 03 Vol. 8; Iss. 1-2

Nucleation of damage centres during ion implantation of silicon

Chadderton, Lewis T.
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Volume:
8
Language:
english
Journal:
Radiation Effects
DOI:
10.1080/00337577108231012
Date:
March, 1971
File:
PDF, 947 KB
english, 1971
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