Multicomponent negative-type photoresist based on Noria analog with 12 ethoxy groups
Niina, Nobumitsu, Kudo, Hiroto, Maruyama, Ken, Kai, Toshiyuki, Shimokawa, Tsutomu, Oizumi, Hiroaki, Itani, Toshiro, Nishikubo, TadatomiVolume:
43
Language:
english
Journal:
Polymer Journal
DOI:
10.1038/pj.2010.146
Date:
April, 2011
File:
PDF, 614 KB
english, 2011