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[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings
Wang, Yue, Stellinga, Daan, Krauss, Thomas F.Year:
2014
Language:
english
DOI:
10.1109/omn.2014.6924515
File:
PDF, 1.22 MB
english, 2014