Fabrication Process and Properties of Fully-Planarized...

IEEE Transactions on Appiled Superconductivity 2015 / 6 Vol. 25; Iss. 3

Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al– $\hbox{AlO}_{\rm x}\hbox{/Nb} $ Josephson Junctions for VLSI Circuits

Tolpygo, Sergey K., Bolkhovsky, Vladimir, Weir, Terence J., Johnson, Leonard M., Gouker, Mark A., Oliver, William D.
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Volume:
25
Language:
english
Journal:
IEEE Transactions on Applied Superconductivity
DOI:
10.1109/tasc.2014.2374836
Date:
June, 2015
File:
PDF, 1.65 MB
english, 2015
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