Etching and Optical Characteristics in GaAs/GaAlAs Surface...

Japanese Journal of Applied Physics 1992 / 5 Vol. 31; Iss. Part 1, No

Etching and Optical Characteristics in GaAs/GaAlAs Surface Emitting Laser Fabrication Using a Novel Spray Etch

Tanobe, Hiromasa, Koyama, Fumio, Iga, Kenichi
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Volume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.1597
Date:
May, 1992
File:
PDF, 1.93 MB
1992
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