Application of Copper-Decoration Method to Characterize...

Japanese Journal of Applied Physics 1992 / 4 Vol. 31; Iss. Part 2, No

Application of Copper-Decoration Method to Characterize As-Grown Czochralski-Silicon

Yamauchi, Tsuyoshi, Tsumori, Yasuo, Nakashizu, Tsuneo, Esaka, Hisao, Takao, Shigeyoshi, Shinoyama, Seiji
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Volume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.L439
Date:
April, 1992
File:
PDF, 1.17 MB
1992
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