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Spray Selective Etch Process for Short-Cavity Fabrication of GaAs/GaAlAs Surface Emitting Laser
Tanobe, Hiromasa, Tamanuki, Takemasa, Uchida, Toshikazu, Koyama, Fumio, Iga, KenichiVolume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.949
Date:
March, 1992
File:
PDF, 461 KB
1992