A New Method of Photothermal Displacement Measurement by...

Japanese Journal of Applied Physics 1992 / 11 Vol. 31; Iss. Part 1, No

A New Method of Photothermal Displacement Measurement by Laser Interferometric Probe -Its Mechanism and Applications to Evaluation of Lattice Damage in Semiconductors

Sumie, Shingo, Takamatsu, Hiroyuki, Nishimoto, Yoshiro, Horiuchi, Takefumi, Nakayama, Hiroshi, Kanata, Takashi, Nishino, Taneo
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Volume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.3575
Date:
November, 1992
File:
PDF, 1.36 MB
1992
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