Direct Observation of Self-Limiting Gallium Deposition on...

Japanese Journal of Applied Physics 1992 / 11 Vol. 31; Iss. Part 2, No

Direct Observation of Self-Limiting Gallium Deposition on GaAs during Laser-Atomic Layer Epitaxial Processing

Simko, Jeffry P., Meguro, Takashi, Iwai, Sohachi, Ozasa, Kazunari, Hirata, Akira, Aoyagi, Yoshinobu, Sugano, Takuo
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Volume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.31.l1518
Date:
November, 1992
File:
PDF, 680 KB
1992
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