In-Depth Profile of Electrical Property of InAs Epitaxial Layer Grown on Semi-Insulating GaAs by Low-Pressure Metalorganic Chemical Vapor Deposition
Iwamura, Yasuo, Shigeta, Hiroyuki, Watanabe, NaozoVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L368
Date:
March, 1993
File:
PDF, 495 KB
1993