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Preparation and oxidation of composite TiN–AlN films from alkoxide solutions by plasma-enhanced CVD
Shiro Shimada, Yoshikazu Takada, Jiro TsujinoVolume:
25
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.jeurceramsoc.2004.12.006
File:
PDF, 387 KB
english, 2005