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Precise Measurement of the Thickness of a Dielectric Layer on a Metal Surface by Use of a Modified Otto Optical Configuration
Kaneoka, Yoshiki, Nishigaki, Kentaro, Mizutani, Yasuhiro, Iwata, TetsuoVolume:
9
Language:
english
Journal:
International Journal of Optomechatronics
DOI:
10.1080/15599612.2014.988386
Date:
January, 2015
File:
PDF, 1.01 MB
english, 2015