Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2005 Vol. 23; Iss. 3
Protecting wafer surface during plasma ignition using an arsenic cap
M. A. Wistey, S. R. Bank, H. B. Yuen, L. L. Goddard, T. Gugov, J. S. HarrisVolume:
23
Year:
2005
Language:
english
DOI:
10.1116/1.1914820
File:
PDF, 559 KB
english, 2005