Precise measurement of the dielectric properties of BaxSr1−xTiO3 thin films by on-wafer through-reflect-line (TRL) calibration method
G. Bhakdisongkhram, S. Okamura, T. ShiosakiVolume:
26
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.jeurceramsoc.2005.09.011
File:
PDF, 384 KB
english, 2006