Gentle dry etching of P(VDF-TrFE) multilayer micro actuator...

Journal of Micromechanics and Microengineering 2008 / 01 Vol. 18; Iss. 1

Gentle dry etching of P(VDF-TrFE) multilayer micro actuator structures by use of an inductive coupled plasma

Edqvist, E, Snis, N, Johansson, S
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Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/1/015007
Date:
January, 2008
File:
PDF, 822 KB
english, 2008
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